| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a program for maintenance and an exposure system in which alignment can be efficiently performed without error even by a worker who does not have detailed knowledge of alignment of an exposure device. <P>SOLUTION: A check sheet is displayed on a terminal apparatus provided in the exposure device to perform maintenance of the exposure device. Information regarding the procedure of alignment of alignment items required for maintaining performance of the exposure device is displayed on a display field R21 of the check sheet, and a software initiation button B2 corresponding to a measuring program to be initiated is displayed on a display field R22 in association with the alignment items. When the button B2 is pressed, the corresponding measuring program is initiated and a result of the measurement is relatively stored on the check sheet. <P>COPYRIGHT: (C)2007,JPO&INPIT |
