发明名称 Apparatus and method of securing a workpiece during high-pressure processing
摘要 An apparatus is disclosed for performing high-pressure processing of a workpiece having a top face and a bottom face. The apparatus comprises a processing chamber and a holder for securing the workpiece within the processing chamber so that a substantial portion of the top face and a substantial portion of the bottom face is exposed to a processing material introduced into the processing chamber. In one embodiment, the holder comprises an upper segment and a lower segment. The lower segment contacts the workpiece at or near an edge of the workpiece, thus supporting the workpiece in a first vertical direction and securing it in a horizontal plane. The upper segment contacts the workpiece at or near an edge of the workpiece, securing it in a second vertical direction.
申请公布号 US7270137(B2) 申请公布日期 2007.09.18
申请号 US20030425701 申请日期 2003.04.28
申请人 TOKYO ELECTRON LIMITED 发明人 YOKOMIZO KENJI
分类号 B08B11/02;B08B7/00;H01L21/687 主分类号 B08B11/02
代理机构 代理人
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