| 摘要 |
An EFEM(Equipment Front End Module) is provided to improve cleanness of a process atmosphere by removing an air-flow distorting element and a particle generating element from the EFEM. An EFEM(3000) includes a frame and a wafer transfer robot. The wafer transfer robot includes a robot body(100), an ankle arm(200), a swing unit, and a wafer hand. The robot body is mounted in the frame(2000) and includes an elevation member which is elevated along a predetermined elevation axis. The ankle arm includes a driving link and plural driven links. The driving link is mounted on the elevation member. An end portion of the driven link is linearly moved in a horizontal direction along a frame surface on which a rod port is mounted. The swing unit is mounted on the end portion of the driven link and rotated around a vertical rotation axis. The wafer hand is mounted on a sliding unit to extract the wafer from a wafer cassette.
|
