发明名称 |
Method of adhering polishing pads and jig for adhering the same |
摘要 |
The method of adhering polishing pads is capable of easily exchanging polishing pads in a comfortable posture. The method comprises the steps of: setting a pad adhering carrier, which has a through-hole in which a roller unit for pressing polishing pads is fixed, in a holder with arranging a roller unit in a radial direction of a lower polishing plate and an upper polishing plate; relatively moving the upper polishing plate toward the lower polishing plate so as to clamp the roller unit between the lower polishing plate and the upper polishing plate with a prescribed force; rotating the lower polishing plate and the upper polishing plate, which clamp the roller unit, in the opposite directions at the same speed; and pressing the polishing pads onto polishing faces of the lower polishing plate and the upper polishing plate by the roller unit.
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申请公布号 |
US7306510(B2) |
申请公布日期 |
2007.12.11 |
申请号 |
US20060580889 |
申请日期 |
2006.10.16 |
申请人 |
FUJIKOSHI MACHINERY CORP. |
发明人 |
NAKAMURA YOSHIO;KOYAMA HARUMICHI |
分类号 |
B24B1/00;B24B37/08;B24B37/12;B24B37/20;H01L21/304 |
主分类号 |
B24B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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