发明名称 Plating solution for electroless deposition of copper
摘要 An electroless copper plating solution is disclosed herein. The solution includes an aqueous copper salt component, an aqueous cobalt salt component, a triamine based complexing agent, and an acidic pH-modifying substance in an amount sufficient to make the electroless copper plating solution acidic. A method of preparing an electroless copper solution is also provided.
申请公布号 US7306662(B2) 申请公布日期 2007.12.11
申请号 US20060382906 申请日期 2006.05.11
申请人 LAM RESEARCH CORPORATION 发明人 VASKELIS ALGIRDAS;NORKUS EUGENIJUS;JACIAUSKIENE JANE;JAGMINIENE ALDONA
分类号 C23C18/38 主分类号 C23C18/38
代理机构 代理人
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