发明名称 |
Systems, apparatus, and methods having a mechanical logic function in a microelectromechanical system sensor |
摘要 |
According to some embodiments, a Microelectromechanical System (MEMS) sensor includes a sensing portion that generates a mechanical movement in response to a measurand input. The sensor also includes a logic portion to mechanically perform a logic function in response to the movement.
|
申请公布号 |
US7307540(B2) |
申请公布日期 |
2007.12.11 |
申请号 |
US20040863376 |
申请日期 |
2004.06.08 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
BERKCAN ERTUGRUL |
分类号 |
G08B21/00;G01D3/08;G01P1/12;G01P15/08;G01R15/20;G01R33/028 |
主分类号 |
G08B21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|