METHOD OF DEPOSITING DIELECTRIC FILMS,申请号KR20010035740-传众专利搜索

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发明名称	METHOD OF DEPOSITING DIELECTRIC FILMS
摘要
申请公布号	KR100801369(B1)	申请公布日期	2008.02.05
申请号	KR20010035740	申请日期	2001.06.22
申请人		发明人
分类号	C23C16/42;H01L21/20;C23C16/32;H01L21/314;H01L21/768;H01L23/522;(IPC1-7):H01L21/20	主分类号	C23C16/42
代理机构		代理人
主权项
地址

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