| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric element which can improve the uniformity of piezoelectric characteristics. SOLUTION: There are a step of drying a sol of organic metal and a step of degreasing it. In the degreasing step, the entire one side of a substrate 512 is closely contacted to a hot plate 100 and the substrate is heated. More concretely, there are a method using a substrate vacuuming hot plate having small holes 104 and a method of loading by a weight 101. The substrate 512 may be pressed onto a metal plate 105 to closely contact enough to straighten the warp of the substrate and mounted on the hot plate 100. A ceramic plate 102 may be laid on the hot plate 100 or it may be heated not by heat conduction but radiation heat, using electric heating wires 103. |
