| 发明名称 |
Deposition apparatus having thermal hood |
| 摘要 |
<p>A deposition apparatus (10) includes a coating chamber (14) and a coating zone (30) within the coating chamber (14) for coating work pieces (12). A heating source (19) heats the coating zone (30), and a thermal hood (32) within the coating chamber (14) is located adjacent to the coating zone (30) for controlling a temperature of the coating zone (30).</p> |
| 申请公布号 |
EP2157204(A1) |
申请公布日期 |
2010.02.24 |
| 申请号 |
EP20090252044 |
申请日期 |
2009.08.24 |
| 申请人 |
UNITED TECHNOLOGIES CORPORATION |
发明人 |
NEAL, JAMES W.;MALONEY, MICHAEL J.;LITTON, DAVID A.;MASUCCI, CHRISTOPHER |
| 分类号 |
C23C14/22;C23C14/30;C23C14/54 |
主分类号 |
C23C14/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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