| 摘要 |
PROBLEM TO BE SOLVED: To cool off with a high reliability in a simple constitution. SOLUTION: For an opening 2b installed in a rectangular waveguide 2, a coaxial tube 4 which is communicated and connected in a T-shape and a sealing means 24 are installed. The coaxial tube 4 is equipped with an inside conductor 41 which penetrated the rectangular waveguide 2 in a direction of the diameter in the opening 2b and which protrudes from the rectangular waveguide 2 at one end side, and an outside conductor 42 which is arranged nearly with the same axis as that of the inner conductor 41 in the outside of one ending side of the inside conductor 41. The sealing means 24 vacuum-seals for the rectangular waveguide 2 a gap between the rectangular waveguide 2 and the inner conductor 41, with an insulator 6 and a plasma generation space 19 formed between the outside conductor 42 and the inside conductor 41, with O rings 20, 22 or the like. Constituted this way, the other ending side of the inner conductor 41 is thermally and electrically coupled to the rectangular waveguide 2. |
