发明名称 METHOD FOR MANUFACTURING GLASS CERAMIC SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a glass ceramic substrate with a high dimensional accuracy which can surely fix the contraction of a glass ceramic green sheet through sintering. SOLUTION: (i) A plurality of glass ceramic green sheets provided with conductor patterns on their surfaces are laminated to make a laminate 1, (ii) the laminate 1 and a laminating green sheet 2 containing a hardly sinterable inorganic material and glass are arranged on the uppermost and lowermost layers and are alternately laminated, (iii) an organic element is removed from the laminate, and it is baked to produce a glass ceramic substrate supporting the laminating sheet, (iv) the laminating sheet is removed from the glass ceramic substrate, and (v) a content of glass in the laminating green sheet 2 is such an amount that it is combined with the glass ceramic green sheet during baking and it does not contract the glass ceramic green sheet substantially within the laminated surface.
申请公布号 JP2001308527(A) 申请公布日期 2001.11.02
申请号 JP20000122853 申请日期 2000.04.24
申请人 KYOCERA CORP 发明人 HASHIGUCHI ISAO
分类号 C04B35/622;H01L23/12;H01L23/15;H05K3/46 主分类号 C04B35/622
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