| 摘要 |
PURPOSE:To obtain a titled photosensitive body which has a high electrostatic charging potential and high dark resistance and provides a high quality image by laminating a compound layer of metal and B, an amorphous silicon layer and amorphous boron layer on a metallic base. CONSTITUTION:A layer 2 of 0.005-10mu thickness consisting of a compound composed of the metal and B specified by the formula MxB1-x (0<x<1; M is any of the metals that form a compd. with B, for example, Al, Ti) is formed on a metallic base 1 having the surface subjected to mechanical polishing and cleaning by defatting, whereby a substrate 19 is obtd. The substrate 19 is fixed in a substrate holder 18 in a reaction vessel 15, and after the inside of the vessel 15 is evacuated through a gas evacuation pipe 20, the substrate 19 is heated by a heater 17, and gaseous H2 and SiH4 are introduced into the vessel from cylinders 10a, 10b; at the same time, high frequency electric power is impressed on a coil 16 from a high frequency power source 22 to induce glow discharge, thereby forming an amorphous silicon layer 3. B2H6 is then introduced from a cylinder 10c into the vessel to deposit an amorphous boron layer 4 on the layer 3. |
