| 摘要 |
A fixture having a header plate (20) in rectangular shape with a notch (28) on each end and an aperture (22) in the middle defined as a through hole. A plurality of microwave connectors (30) are located on the top surface of the header plate (20) adjacent to the aperture and penetrate through the body with the connector extended contact planar with the bottom. A substrate (32) of dielectric material with a ground plane on one side and a plurality of striplines (34) on the other is attached into a recess peripherally positioned on the bottom side of the aperture (22). The striplines (34) are joined to the connectors (30) on one end and to individual probe needles (38) with angular tips on the other near the midmost point. A centrally located access opening (36) in the substrate (32) allows visual indication of the probe needles (38) for positioning upon node points and inspection points on a microwave semiconductor wafer under test. The device allows a flowpath for microwave signals from the needle tips through the striplines (34) to the connectors (30) for testing purposes.
|
