| 摘要 |
PURPOSE:To position a wafer simply in an extremely short time by forming orientation flats to both a discoid bottom and a cover section. CONSTITUTION:Orientation flats 11 are shaped at respective same positions in two upper and lower disks 3. A wafer basket 1 with the orientation flats 11 positions a wafer to a shaft by the operation of a conventional method. Even when the wafer basket is removed, however, the orientation flats 11 and a member such as the post section of a quartz table 6 may be conformed as positioning references 12.
|
