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发明名称
摘要
申请公布号	JPH0461497(B2)	申请公布日期	1992.10.01
申请号	JP19870114636	申请日期	1987.05.13
申请人	HITACHI LTD	发明人	KAMIGAKI YOSHIAKI;ITO KYOO;MASUDA HIROO
分类号	H01L29/78;H01L21/336	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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