| 摘要 |
PURPOSE:To realize the method for measuring the diameter of a charged-particle beam, which can measure the diameter of the beam simply in high accuracy. CONSTITUTION:A scanning signal is supplied into a deflecting device 2 from a computer 3 by way of a DA converter 4 and an amplifier 5. With scanning signal, an electron beam EB is made to scan skippingly at a scanning-step interval (increment), which is approximately equal to the diameter of the electron beam. At this time, the electron beam EB is obliquely scanned with respect to a boundary B. In order to perform the oblique scanning, the scanning field of the EB can be rotated by an angle theta, or a base is rotated by a specified angle. As a result, the amount of the data obtained by the scanning at the increment approximately equal to the diameter of the electron beam is increased in comparison with a conventional method. The signal detected with a detector 8 is differentiated with a differentiating circuit 10 and thereafter supplied into the computer 3.
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