Heater for evaporation and evaporation equipment

摘要

An equipment for evaporation of aluminum reflecting layers on the surfaces of a plurality of plastic substrates (8) to form optical discs comprises a plurality of ceramic heaters (4) each being formed of boron nitride in a shape of rectangular parallelepiped and having a cavity (4c) on the lowered top surface for placing an aluminum ingot and one or more holes extending from the bottom of the cavity to the bottom surface or one or more side surfaces of the heater. Molten aluminum evaporates from the top surface and also creeps over the side surface as well as inside of the holes to evaporate downwards and to the side, so that an improved overall layer thickness profile is achieved irrespectively of positions of plastic substrates, especially for vertical positioned substrates, in the vacuum evaporation cage. <IMAGE>