| 摘要 |
An object of the present invention is to provide a reference sample for easily and accurately calibrating a region of recesses and projections of several ten angstroms to several angstroms for the observation of which an inter-atom force microscope displays its performance. The method of manufacturing reference samples according to the present invention, wherein an object to be measured and a probe are placed in an opposed state with a minute clearance left between the surface of the former and a free end of the latter, to manufacture a reference sample used to calibrate an amount of displacement measured with an inter-atom force microscope formed so as to convert an inter-atom force which works between the atoms constituting the object to be measured and probe into mechanical displacement, is characterized in that etching is carried out with an etching agent of an extremely low etching speed as a rate of etching a stepped portion of a pattern is accurately controlled. <IMAGE> |
