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发明名称
Multistage vacuum pump
摘要
申请公布号
EP0731274(B1)
申请公布日期
1998.03.25
申请号
EP19960108071
申请日期
1993.12.17
申请人
COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION;FUJI SEIKI INC.
发明人
BEZ, ECKHARD
分类号
F04B25/02;F04B37/14;F04B37/16;F04B41/06;F04B49/00;F04B53/10;(IPC1-7):F04B37/16
主分类号
F04B25/02
代理机构
代理人
主权项
地址
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