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发明名称
PHOTORESIST FILM
摘要
申请公布号
JPH10142786(A)
申请公布日期
1998.05.29
申请号
JP19960312697
申请日期
1996.11.07
申请人
NIPPON SYNTHETIC CHEM IND CO LTD:THE
发明人
IZUMI TSUKASA
分类号
G03F7/004;C09K11/00;C09K11/08;G03F7/027;H01J9/227;(IPC1-7):G03F7/027
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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