LIQUID-SAVING LIQUID-SUPPLY NOZZLE USED FOR WET TREATMENT INCLUDING CLEANING, ETCHING, DEVELOPMENT, STRIPPING, ETC., AS WELL AS APPARATUS AND METHOD FOR WET TREATMENT,申请号JP19960334632-传众专利搜索

发明名称	LIQUID-SAVING LIQUID-SUPPLY NOZZLE USED FOR WET TREATMENT INCLUDING CLEANING, ETCHING, DEVELOPMENT, STRIPPING, ETC., AS WELL AS APPARATUS AND METHOD FOR WET TREATMENT
摘要
申请公布号	JPH10163153(A)	申请公布日期	1998.06.19
申请号	JP19960334632	申请日期	1996.11.29
申请人	OMI TADAHIRO;FURONTETSUKU:KK;JAPAN ORGANO CO LTD	发明人	MIMORI KENICHI;GO GIRETSU;OMI TADAHIRO;KASAMA YASUHIKO;ABE AKIRA;IMAOKA TAKAYUKI
分类号	C23G3/00;C23F1/08;H01L21/027;H01L21/304;H01L21/306;(IPC1-7):H01L21/304	主分类号	C23G3/00
代理机构		代理人
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