CERAMIC RESISTOR AND ELECTROSTATIC CHUCK USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a ceramic resistor which has a 10<8> to 10<12> Ω.cm volume resistivity at 0 to 50 deg.C and is capable of obtaining a high attracting force due to the Johnson-Rabbeck effect at <=200 deg.C and also, to provide an electrostatic chuck using the ceramic resistor. SOLUTION: This resistor 2 consists essentially of aluminum nitride and concurrently contains 2 to 20 mol.% cerium expressed in terms of cerium oxide (CeO2 ) and CeAlO3 and also, has a 10<8> to 10<12> Ω.cm volume resistivity at 0 to 50 deg.C and is used as a component of an electrostatic chuck 1 for attracting and holding an object to be fixed by electrostatic force.