Thermal analyzer and a method of measuring with the same

摘要

A thermal analyzer scans temperature by thermally altering a sample and measuring a thermal change based on physical and chemical changes of the sample as a function of time and/or temperature. The thermal analyzer includes a heat-generating section for heating a sample. The heat-generating section includes a first semiconductor substrate of a first conductivity type forming a thin-film heater with a cavity section in a lower section thereof and a second semiconductor substrate of a second conductivity type connected to the first substrate. The cavity section forms a sample holding section for holding the sample. The thermal analyzer further includes a temperature detecting section for detecting a temperature of the sample holding section. The sample holding section and the temperature detecting section are monolithically formed on the thin-film heater or an area proximate the thin-film heater in a thin-film supporting section for supporting the thin-film heater.