| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing sheet, a polishing pad, and a polishing belt excellent in chemical resistance, oil resistance, low friction, and thermal resistance, having good retention of abrasive particle slurry, which may be fixed abrasive grain, and also having a high polishing speed and excellent cleaning ability. SOLUTION: This polishing member is formed by a mould body obtained by heating under pressure a single web of fluororesin fiber made by confounding the fluororesin fibers or a multilayer sheet made by confounding it with a foundation cloth. If needed, inorganic particles may be arranged on a sheet surface. |
