| 摘要 |
PURPOSE:To decompose and remove hydrogen peroxide in waste ultra-pure water in an extremely efficient manner and to almost prevent the leakage of impurities to water by bringing waste ultra-pure water into contact with permanganic acid type anion exchange resin. CONSTITUTION:Hydrogen peroxide in waste ultra-pure water is removed by bringing waste ultra-pure water into contact with a permanganic acid type anion exchange resin. The permanganic acid type anion exchange resin is prepared by passing an aqueous solution containing permanganic acid or a salt thereof through an anion exchange resin to perform ion exchange reaction. When an aqueous solution containing hydrogen peroxide is passed through the prepared permanganic acid type anion exchange resin, hydrogen peroxide is decomposed and manganese dioxide is precipitated on anion exchange resin particles to obtain a manganese oxide supported anion exchange resin. When the aqueous solution containing hydrogen peroxide is further passed through this anion exchange resin, manganese oxide supported on the anion exchange resin becomes a catalyst to continue the decomposition of hydrogen peroxide. |
