发明名称 RESIST LIQUID FEEDER AND REFORMING KIT FOR OBTAINING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a resist liquid feeder capable of reducing overall supply cost of resist liquid by avoiding use of an expensive small special vessel that can be directly connected as it is to a current LCD panel manufacturing line while reducing a transportation cost of the resist liquid. <P>SOLUTION: In the resist liquid feeder, the concentration and/or viscosity of the liquid in a blending tank is detected. Based on the detection result, the dispensing amount of raw material and solvent is adjusted for dilution control. The resist liquid for products obtained by dilution control is held in a buffer tub for a specified period for stability. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007103895(A) 申请公布日期 2007.04.19
申请号 JP20060026074 申请日期 2006.02.02
申请人 TOKYO OHKA KOGYO CO LTD 发明人 MORIO KIMITAKA;AOKI TOMOSABURO;HASEGAWA TORU
分类号 H01L21/027;G03F7/16 主分类号 H01L21/027
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