| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection device allowing preparation to be made easily and quickly. SOLUTION: A visual inspection device 1 comprises a wafer supporting part 4 supporting a wafer W rotatably in XYZ directions and around Z axis and a circumference photographing part 5 arranged at the close position to observe the circumference part of the wafer W. A computer 41 controlling the visual inspection device 1 comprises: an inspection controlling part 51 performing processing of the visual inspection for the circumference part of the wafer W according to a recipe; and an interrupt processing part 52 suspending an inspection according to the recipe and receiving the change of inspection conditions from scrolling bars 71, 72, when an inspector makes a choice of an interrupt processing. COPYRIGHT: (C)2008,JPO&INPIT |
