WAFERLESS RECIPE OPTIMIZATION

摘要

A recipe optimization method for optimizing a measuring tool is provided to minimize human intervention during the optimization. A recipe optimization method for optimizing a measuring tool to measure at least one characteristic of a semiconductor target, comprises providing a set of specification and initial input data for a particular target, the specification limiting characteristics of images to be measured by the measuring tool; and automatically optimizing the measuring tool for measuring the particular target in order to satisfy at least one of the provided specifications without additional human intervention regarding the measuring tool. The measuring tool is an optical measuring tool or a scanning electron microscope.