Deposition of Polymeric Films

摘要

An apparatus for and method of depositing a polymeric film on a substrate (5), the apparatus comprising: a delivery unit (7, 8) for delivering an aerosol spray comprising aerosol droplets of a liquid precursor comprising a polymeric phase to the substrate, the polymeric phase comprising a polymeric material and at least one solvent; a heating unit (15) for at least heating an environment such as at least partially to evaporate the at least one solvent of the polymeric phase prior to the aerosol droplets depositing on the substrate; and an electrostatic field generation unit (9) for generating an electrostatic field between the delivery unit and the substrate, and electrostatically charging the aerosol droplets such that the aerosol droplets are electrostatically attracted to the substrate.