| 摘要 |
PROBLEM TO BE SOLVED: To reduce irregularities in an ashing rate due to deterioration with age inside an ashing chamber. SOLUTION: In order to make the ashing rate constant, the reduction is indirectly monitored on the number of oxygen atoms in the ashing gas inside a process chamber 101, and the ashing gas is fed in volume equivalent to the reduced number of the oxygen atom. As the indirect monitoring means, such performance is executed that the opening of an APC valve 130 is monitored, and the reduced ashing gas is estimated and fed. COPYRIGHT: (C)2009,JPO&INPIT |
