| 摘要 |
PROBLEM TO BE SOLVED: To provide a catalyst coating device uniformly coating a substrate surface with a catalyst for carbon nanotube synthetic apparatus. SOLUTION: The catalyst coating device includes a mesh board having a mesh at the bottom while holding the catalyst for coating a substrate, a transferring part transferring the mesh board or the substrate, and a vibrator vibrating the mesh board and coating the substrate with the catalyst. COPYRIGHT: (C)2009,JPO&INPIT |
