| 摘要 |
PROBLEM TO BE SOLVED: To obtain a lead frame for use in a physical value sensor for measuring the orientation or the direction of physical values, such as magnetism or gravity, and to manufacture a physical value sensor which can detect orientation or acceleration in three-dimensional space with high accuracy. SOLUTION: The lead frame 1 made of a thin metal plate comprises stage portions 7 and 9, a frame portion 11 equipped with leads 17 arranged on the periphery thereof, and portions 13 for coupling the stage portions 7 and 9 and the frame portion 11 each other. At least a part of the coupling portion 13 is constituted of a shape memory array and formed deformably. COPYRIGHT: (C)2007,JPO&INPIT |
