| 摘要 |
The present invention provides an X-ray source, which can improve the manufacture productivity of the X-ray source and can significantly reduce an alignment defect of a carbon nanotube (CNT) tip and a gate by quickly aligning the CNT tip and the gate. The X-ray source includes a cathode having at least one CNT tip for emission of electrons, and a gate disposed on an upper part of the at least one CNT tip for emission of electrons to excite electrons from the at least one CNT tip for emission of electrons. The at least one CNT tip for emission of electrons has a linear shape and is coated onto the cathode, and the gate includes a plurality of conductors, and are arranged such that the at least one CNT tip correspond to a space between the adjacent conductors. Thus, alignment work can be quickly performed, and the number of alignment errors can be reduced, thus lowering a failure rate. |
