| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming apparatus having a shower head capable of quickly purging gas passages.SOLUTION: The film forming apparatus includes a shower head provided above a susceptor and having a first passage and a second passage independent of the first passage formed therein, wherein the first passage is formed through the shower head by being provided with a first cavity surrounded by a first upper wall and a first lower wall and expanding horizontally, a first thin hole formed in the first upper wall, and a plurality of second thin holes formed in the first lower wall; the height of the first upper wall in the vertical direction is reduced with increase in the distance from the first thin hole; the second passage is formed through the shower head by being provided with a second cavity surrounded by a second upper wall and a second lower wall and expanding horizontally, a third thin hole formed in the second upper wall, and a plurality of fourth thin holes formed in the second lower wall; and the height of the second upper wall in the vertical direction is reduced with increase in the distance from the third thin hole.SELECTED DRAWING: Figure 1 |
