Transducer structure and method for MEMS devices

摘要

An improved MEMS transducer apparatus and method is provided. The apparatus has a movable base structure including an outer surface region and at least one portion removed to form at least one inner surface region. At least one intermediate anchor structure is disposed within the inner surface region. The apparatus includes an intermediate spring structure operably coupled to the central anchor structure, and at least one portion of the inner surface region. A capacitor element is disposed within the inner surface region.

主权项

1. A method of fabricating a transducer apparatus, the method comprising:
providing a substrate member having a surface region; forming a movable base structure having an outer surface region overlying the surface region; removing at least one portion from the movable base structure to form at least one cavity disposed substantially within the movable base structure, the at least one cavity having a cavity inner surface region; forming at least one anchor structure spatially disposed within the at least one cavity, the anchor structure being coupled to at least a portion of the substrate; forming at least one spring structure coupled to at least one portion of the cavity inner surface region, the spring structure being coupled to the anchor structure; and forming at least one capacitor element spatially disposed within a vicinity of a corresponding cavity.