| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam axis alignment method capable of easily aligning an axis of charged particle beam.SOLUTION: A charged particle beam axis aligning method includes: an image data acquisition step S10 of acquiring plural sets of image data by varying conditions of a focus position in an incident direction of charged particle beam on a specimen, an exciting current of a first alignment coil, and an exciting current of a second alignment coil; a first calculation step S11 of calculating a rotation center position vector connecting a position of a rotation center of an image based on rotation of an image due to variation of the focus position and a position of a visual field center of the image for each set of the image data acquired by varying the focus position; and second calculation steps S12, S13 of calculating an exciting current value of the first alignment coil and an exciting current value of the second alignment coil for aligning the axis of the charged particle beam from the rotation center position vector calculated in the first calculation step S11. |
