Lattice mismatched hetero-epitaxial film

摘要

An embodiment concerns forming an EPI film on a substrate where the EPI film has a different lattice constant from the substrate. The EPI film and substrate may include different materials to collectively form a hetero-epitaxial device having, for example, a Si and/or SiGe substrate and a III-V or IV film. The EPI film may be one of multiple EPI layers or films and the films may include different materials from one another and may directly contact one another. Further, the multiple EPI layers may be doped differently from another in terms of doping concentration and/or doping polarity. One embodiment includes creating a horizontally oriented hetero-epitaxial structure. Another embodiment includes a vertically oriented hetero-epitaxial structure. The hetero-epitaxial structures may include, for example, a bipolar junction transistor, heterojunction bipolar transistor, thyristor, and tunneling field effect transistor among others. Other embodiments are described herein.

主权项

1. An apparatus comprising:
a substrate included in a plane having a substrate major axis corresponding to substrate width and a substrate minor axis corresponding to substrate height; and a first epitaxial (EPI) cladding layer adjacent second and third EPI cladding layers, the first, second, and third EPI claddings layers included in a plane, the plane including a planar major axis generally parallel to the substrate major axis and intersecting the first, second, and third EPI claddings layers; wherein the substrate includes a substrate lattice constant and one of the first, second, and third cladding layers includes a lattice constant unequal to the substrate lattice constant; wherein the third EPI cladding layer includes a third EPI cladding material equal to a second EPI cladding material; wherein the first EPI cladding layer is doped with a polarity and the second and third EPI cladding layers are doped with another polarity opposite the polarity of the first EPI cladding layer; wherein the second and third EPI cladding layers are equidistant from one of (a) a fin that extends towards the substrate, and (b) a trench that extends towards the substrate.