发明名称 |
RADIATION-SENSITIVE RESIN COMPOSITION, CURED FILM, METHOD OF FORMING THE SAME, AND DISPLAY ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition which can form a cured film having sufficient radiation sensitivity and excellent insulation and corrosion prevention properties, a cured film formed from the radiation-sensitive resin composition and a method of forming the same, and a display element having the cured film.SOLUTION: A radiation-sensitive resin composition has a polymer having a structural unit represented by formula (a-1), a structural unit represented by formula (a-2), and a structural unit represented by formula (a-3), and a photosensitizer.SELECTED DRAWING: None |
申请公布号 |
JP2016133575(A) |
申请公布日期 |
2016.07.25 |
申请号 |
JP20150007290 |
申请日期 |
2015.01.16 |
申请人 |
JSR CORP |
发明人 |
MATSUMOTO AKIYUKI;ASAOKA TAKAHIDE;KONNO YOSUKE;HAMADA KENICHI |
分类号 |
G03F7/023;C08F212/08;H01L21/027 |
主分类号 |
G03F7/023 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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