发明名称 RADIATION-SENSITIVE RESIN COMPOSITION, CURED FILM, METHOD OF FORMING THE SAME, AND DISPLAY ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition which can form a cured film having sufficient radiation sensitivity and excellent insulation and corrosion prevention properties, a cured film formed from the radiation-sensitive resin composition and a method of forming the same, and a display element having the cured film.SOLUTION: A radiation-sensitive resin composition has a polymer having a structural unit represented by formula (a-1), a structural unit represented by formula (a-2), and a structural unit represented by formula (a-3), and a photosensitizer.SELECTED DRAWING: None
申请公布号 JP2016133575(A) 申请公布日期 2016.07.25
申请号 JP20150007290 申请日期 2015.01.16
申请人 JSR CORP 发明人 MATSUMOTO AKIYUKI;ASAOKA TAKAHIDE;KONNO YOSUKE;HAMADA KENICHI
分类号 G03F7/023;C08F212/08;H01L21/027 主分类号 G03F7/023
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