| 摘要 |
The present invention relates to a leak proof device of an isolation valve for manufacturing a semiconductor which can find a trouble or malfunction due to abnormal pressure of the isolation valve and prevent defects and working place contamination due to malfunction and trouble in a manufacturing process of the entire semiconductor manufacturing device, given a structure embedded in a body unit coupled to the isolation valve wherein a displacement unit moves in accordance with abnormal pressure inside the isolation vale and airtightness of the body unit and the displacement unit is maintained by an airtightness unit. |
