| 摘要 |
A laser imaging apparatus for forming an image on a surface of a substrate is provided with a laser source that emits a laser beam, a table mounting the substrate, the table being movable in a first direction within a predetermined plane, a scanning optical system which receives and deflects the laser beam emitted by the laser source to form a scanning beam spot on the substrate, the scanning beam spot scanning in a second direction that is perpendicular to the first direction, and a mechanism that moves the scanning optical system in the second direction.
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