发明名称 Conveyance system and conveyance method
摘要 A conveyance system according to the present invention includes a processing station, first to third conveyance apparatuses arranged in a conveying direction of a work piece. The second conveyance apparatus is provided in the station. The system further includes a lifting apparatus disposed below the second conveyance apparatus in the station, and a processing apparatus in the processing station. The first and second conveyance apparatuses perform returning of the pallet that is empty in a direction reverse to the conveyance direction.
申请公布号 US9443717(B2) 申请公布日期 2016.09.13
申请号 US201514792105 申请日期 2015.07.06
申请人 HIRATA CORPORATION 发明人 Takano Junji;Mitsushima Hiroya
分类号 H01L21/02 主分类号 H01L21/02
代理机构 Buchanan Ingersoll & Rooney PC 代理人 Buchanan Ingersoll & Rooney PC
主权项 1. A conveyance system including a processing station that processes a work piece fed in and feeds out the work piece after being processed, said conveyance system comprising: a first conveyance apparatus that feeds in the work piece into said processing station; a second conveyance apparatus provided in said processing station and disposed subsequently adjacent to said first conveyance apparatus at a downstream side of said first conveyance apparatus in a conveyance direction of the work piece; a third conveyance apparatus disposed subsequently adjacent to said second conveyance apparatus at a downstream side of said second conveyance apparatus in the conveyance direction, said third conveyance apparatus conveying the work piece fed out from said processing station; a lifting apparatus disposed below said second conveyance apparatus in said processing station and moving the work piece upward and downward; and a processing apparatus disposed in said processing station and processing the work piece lifted up by said lifting apparatus, wherein said first conveyance apparatus performs conveyance of a pallet on which the work piece is placed in the conveyance direction and returning of the pallet that is empty in a direction reverse to the conveyance direction, said second conveyance apparatus performs conveyance of the pallet on which the work piece is placed in the conveyance direction, returning of the pallet that is empty in the direction reverse to the conveyance direction and conveyance of the work piece in the conveyance direction, said lifting apparatus performs lifting of the work piece placed on the pallet on said second conveyance apparatus and moving the work piece down onto said second conveyance apparatus, and said third conveyance apparatus performs the conveyance of the work piece in the conveyance direction.
地址 Shinagawa-Ku, Tokyo JP