Methods and apparatus for substrate edge cleaning

摘要

A substrate cleaning apparatus may include a substrate support having a support surface to support a substrate to be cleaned, wherein the substrate support is rotatable about a central axis normal to the support surface; a first nozzle to provide a first cleaning gas to a region of the inner volume corresponding to the position of an edge of the substrate when the substrate is supported by the support surface of the substrate support; a first annular body disposed opposite and spaced apart from the support surface of the substrate support by a gap, the first annular body having a central opening defined by an inner wall shaped to provide a reducing size of the gap between the first annular body and the support surface in a radially outward direction; and a first gas inlet to provide a first gas to the central opening of the first annular body.

主权项

1. A substrate cleaning apparatus, comprising:
a substrate support having a support surface to support a substrate to be cleaned, wherein the substrate support is rotatable about a central axis normal to the support surface; a first nozzle to provide a first cleaning gas to a region corresponding to the position of a radial edge of the substrate away from the central axis when the substrate is supported by the support surface of the substrate support, wherein the first nozzle is positioned to face the edge of the substrate when the substrate is supported by the support surface; a first annular body disposed opposite and spaced apart from the support surface of the substrate support by a gap, the first annular body having a central opening defined by an inner wall of the first annular body extending from a first side of the first annular body remote from the support surface to a second side of the first annular body proximate to the support surface, wherein the central opening proximate to the support surface is sized to expose a predominant portion of the support surface, and wherein the inner wall is shaped to provide a reducing size of the gap between the first annular body and the support surface in a radially outward direction; and a first gas inlet to provide a first gas to the central opening of the first annular body.