Charged-particle beam device

摘要

This charged-particle beam device changes conditions for combining an intensity ratio between upper and lower deflectors and rotation angles of the deflectors in multiple ways when obtaining images having different pixel sizes in the vertical and horizontal directions. Then, the charged-particle beam device determines an optimal intensity ratio between the upper and lower deflectors and rotation angles of the deflectors on the basis of variations in size value measured in the larger pixel size direction (Y-direction) of the image. As a result, it is possible to extend the field of view in the Y-direction while reducing deflection aberrations when measuring at high precision in the X-direction.

主权项

1. A charged-particle beam device comprising:
a sample stage on which a sample is placed; a scanning optical system that scans a charged particle beam over the sample; a first deflector and a second deflector that deflect the charged particle beam; an image acquiring unit that acquires an image having a pixel size greater in a second direction than in a first direction based on electrons emitted from the sample; an image storage unit that stores a plurality of the images in which combination conditions of a deflection intensity ratio and a rotation angle for the first deflector and the second deflector are changed; and an evaluation unit that determines a combination of the deflection intensity ratio and the rotation angle for the first deflector and the second deflector based on a variation in the second direction in the stored plurality of the images.