| 摘要 |
The invention provides a MEMS acoustic actuator having a substrate, an acoustic wave generator for generating an acoustic wave, the acoustic wave generator is disposed on the substrate, and a moveable element for receiving the acoustic wave, said moveable element is operatively connected to the acoustic wave generator such that th e acoustic wave generator is capable of exerting sufficient acoustic radiation pressure for moving the moveable element. The moveable element has a planar surface for receivin g and deflecting the acoustic wave.
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