发明名称 |
MANUFACTURING METHOD FOR SINTERED ALUMINIUM NITRIDE |
摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method with good reproductivity for sintered aluminium nitride which has excellent corrosion resistance, is fine and has good heat conductivity. SOLUTION: This is the manufacturing method for sintered aluminium nitride by which a composite of aluminium nitrate blended with at least sintering additives and organic binder is formed and the formed material is treated by thermal degreasing process and then sintering process, whose characteristic is to use acryl copolymer as the organic binder. |
申请公布号 |
JP2002003277(A) |
申请公布日期 |
2002.01.09 |
申请号 |
JP20000186069 |
申请日期 |
2000.06.21 |
申请人 |
TOSHIBA CERAMICS CO LTD |
发明人 |
AONUMA SHINICHIRO;MURAMATSU SHIGEKO;FUJITA MITSUHIRO;ICHIJIMA MASAHIKO;MIYAZAKI AKIRA |
分类号 |
C04B35/581;H01L21/68;H01L21/683 |
主分类号 |
C04B35/581 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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