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发明名称
Process for making refractory metal silicide cap for protecting multi-layer polycide structure
摘要
申请公布号
US4886764(A)
申请公布日期
1989.12.12
申请号
US19890357666
申请日期
1989.05.25
申请人
SGS-THOMSON MICROELECTRONICS, INC.
发明人
MILLER, ROBERT O.;LIOU, FU-TAI
分类号
H01L21/28;H01L21/285;H01L21/336
主分类号
H01L21/28
代理机构
代理人
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