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发明名称
OXYGEN ATOM GENERATOR
摘要
申请公布号
JPH0412003(A)
申请公布日期
1992.01.16
申请号
JP19900113547
申请日期
1990.04.27
申请人
MITSUBISHI ELECTRIC CORP
发明人
INOUE SHINICHI;YAMANISHI KENICHIRO;TANAKA MASAAKI
分类号
C01B13/02;C01G1/00;C23C14/22;C23C14/24;H01L39/24
主分类号
C01B13/02
代理机构
代理人
主权项
地址
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