| 摘要 |
PURPOSE:To eliminate or facilitate a carbon removing operation after drilling ion current control holes in an insulating layer and to improve workability and productivity by removing the carbon generated at the time of drilling the ion current control holes in the insulating layer film by irradiation with an excimer laser beam. CONSTITUTION:An enclosure 70 which encloses an area S to be irradiated with the excimer laser beam at the time of irradiating the insulating layer 31 with the excimer laser beam is provided and a suction tube 71 for sucking away the fine powder of the carbon generated at the time of the irradiation of the insulating layer 31 with the excimer laser beam is connected to this enclosure 70. |
