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发明名称
INTEGRATED CIRCUIT
摘要
申请公布号
JPH09257884(A)
申请公布日期
1997.10.03
申请号
JP19960061306
申请日期
1996.03.18
申请人
SHARP CORP
发明人
OKANO NOBUHIRO
分类号
G01R31/317;G01R31/28;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):G01R31/317
主分类号
G01R31/317
代理机构
代理人
主权项
地址
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