APPARATUS FOR INSPECTING FOREIGN MATTER AND METHOD USING THE SAME,申请号JP19960094917-传众专利搜索

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发明名称	APPARATUS FOR INSPECTING FOREIGN MATTER AND METHOD USING THE SAME
摘要
申请公布号	JPH09257718(A)	申请公布日期	1997.10.03
申请号	JP19960094917	申请日期	1996.03.25
申请人	CANON INC	发明人	IWANAGA TAKEHIKO
分类号	G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/88	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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